SuMMIT Download and Documentation Page






3/10/08: Version 5.6.0
- Fix problem with roughness exponent calculation from the autocorrelation plot in advanced LER tool
- Add unbiased, infinity, filtered LER results to main screen, replacing raw LER
- Add automatic 1x-pitch post-filter cut-off period setting to match ITRS definition
- Fix problem with Process-window toolbox reading linear FEM files without using the Developer's Kit



Click here to download SuMMIT 5.6.0


Click here to access SuMMIT documentation


Contact SuMMIT E-mail Support






RECENT UPDATE HISTORY

1/14/08: Version 5.5.0
- Multi ROI capabilities added to the contact-analysis mode
- Fix problem with preserved limit lines and auto-rotation
- Fix problem with exporting to mat file format from surface-analysis toolbox
- Fix problem with limit lines not reseting on image size change
- Process-window analysis toolbox now available
------ Changes since beta release:
------------- New linear FEM file format added for compatibility with SuMMIT batch output
------------- Improved GUI
------------ Improved robustness in input FEM file
------------- New plot export capabilities

11/2/07: Version 5.3.1
- Fix problems with batch analysis of aerial-image modeling output files
- Improved support for machines with multiple MAC addresses
- Fix problem with exporting to mat file format from surface-analysis toolbox
- Add surface synthesis and export capabilities to surface-analysis toolbox

10/2/07: Version 5.3.0
- Simultaneous automatic H-V capabilities added to Multi ROI mode
- Add pattern rec capabilities to the multi ROI mode
- Fix problem that limited the pick file to batch function to selecting 15 files max.

8/24/07: Version 5.1.0
- Add new multi pitch autofence algorithm
- Fixed problem with application of limits loaded in from saved recipes or entered directly in the recipe tool
- Implement software controls preventing user from activating "fine rotation detection" without also having "full projection filtering" enabled
- Fixed problem with exporting data to csv file when only 1 single line is analyzed
- Fixed bug that caused error when running batch mode with single line analysis
- Fixed problem that caused limit line on-load mode setting to be ignored in batch mode

7/3/07: Version 5.0.0
- Add multiple arbitrary location and size region CD/LER computation capabilities to the contact-analysis toolbox
- New LER metric plot tool
- Add binarize image command to script language
- Data export now supports corner-rounding mode
- Improved robustness for the contact-analysis toolbox
- Improved accuracy of LWR computation with rectangular pixels

5/20/07: Version 4.7.2
- Enabled global image thresholding for corner-rounding toolbox
- Improved error checking for corner-rounding toolbox
- Added slot reference shape capability to contact-analysis toolbox
- Improved accuracy of correlation length calculation in presence of strong noise
- Improved accuracy of automated noise-floor estimation
- Fixed bug in side-averaging threshold algorithm that caused warning message to be repeadedly displayed slowing calculation down
- Fixed bug in side-averaging threshold algorithm that caused incorrect threshold value on right side with certain fence positions
- Fixed error in roughness exponent values stored in batch output file
- Added both filtered and unfiltered spatial metrics to batch output file
- Added both LER and LWR metrics to batch output file
- Added filter LER and LWR spatial metrics results to the csv export file

4/21/07: Version 4.7.0
- Improved robustness of contact gap measurement capability in contact toolbox
- Fixed problem with Pick Files to Batch capability that caused program to crash when not using the Developer's Kit
- Improved efficiency of Advanced LER Tool Summary calculation
- Corrected errors in Advanced LER Tool Summary report
- Improved robustness of contact LER measurement capability in contact toolbox
- Made Pattern Recognition capability compatible with batch mode operation

3/18/07: Version 4.6.5
- Fixed bug causing import problems in corner rounding mode
- Fixed bug causing scaling problems after image processing actions
- Added new threshold capability to image processing menu
- Improved usability of recipe tool
- Improved user interface for corner rounding toolbox
- Increased robustness of corner-rounding toolbox
- Imroved accuracy of corner-rounding calculations
- Fixed error with pitch computation with polynomial edge interpolation
- Added new filtered unbiased and infinity LER/LWR computation
- New contact gap measurement capability in the contact toolbox
- Fix bug causing sporadic problems with placing fenced
- Improved visibility of vertical fence lines
- Fixed bug that caused error when loading pre version 4.5.0 recipes in newer versions
- Fixed bug that caused file open dialog box image preview failures on some installations of windows
- Updated recipes distributed with SuMMIT
- Fixed bug that caused fences to be deleted after use of recipe tool
- Fixed bug that caused error in contact LER analysis with circular reference shape
- Improved contact toolbox autofencing allowing single contacts to be handled
- Add apply prefilter command to script language

1/26/07: Version 4.5.3
- Fixed bug causing read problems with some tiff files
- Improved accuracy of edge-visualization overlay line. This no impact on actual measured CD or LER values - Added toolbox information to About box
- Added HOST function prefiltering capabilities, good for dealing with aerial-image data

12/9/06: Version 4.5.0
- Fixed bug that caused crash when no lines were found between fences
- Improved accuracy of linear interpolation method for edge detection
- Improved PSD noise-floor detection algortithm to better handle extrememly low-noise LER data such as synthesized data
- Improved accuracy when dealing with post-filtered data in the PSD component of the Advanced LER Tool
- Add ability to read MicroMap files (mostly relevant to surface analysis toolbox)
- Fixed bug in auto brightness/contrast correction rountine
- Fixed problem with setting of the check mark on the analyze trenches menu item
- Enabled anisotropic sigma setting for gaussian prefilt
- Enabled setting of prefilter size and sigma through script language
- Enabled anisotropic sigma setting for contact-mode coarse gaussian prefilt
- Improved error checking for prefilter settings variable

10/30/06: Version 4.4.4
- Fix bug that caused reference shape to potentially be drawn in the wrong orientation when analyzing contacts with elliptical reference
- Improve contact field variation algorithm
- Improved speed of model-based sigmoidal edge fitting
- Fixed bug with polynomial and sigmoidal interpolation in corner rounding mode
- Fixed bug in compound analysis routine that appeared with release of contact toolbox
- Fixed bug that caused crashes in auto-roi-calculate mode when the roi was too small
- Added semi-auto mode capability to the corner-rounding toolbox potentially improving the accuracy of the calculation when the orthogonal edges of the corner are not well defined

7/13/06: Version 4.4.2
- Fixed bug related to reporting image pixel 2D size information after running interactive calibration routines
- Fix bug related to rotating images without having the default values set for limit line positions
- Corrected reporting of major and minor axis and orientation values for contact features
- Fixed bug that caused program crash when using skip or backup functionality while running batch file with semi-auto-fence
- Corrected problem with LWR measure and plotting in contact mode
- Add option to display the contact reference shape on top of the image instead of the detected edge, this option is set through the recipe tool
- Fixed bug that caused crash on certain tiff images

6/1/06: Version 4.4.1
- Added enhanced batch file capabilities such that dose and focus can be defined for each entry. In this mode an additional output file is created containing only four columns: focus, dose, CD, LER
- Fixed bug that caused crash when changing the auto-noise-floor setting with no image loaded
- Fixed bug with pattern rec that caused SuMMIT to act erratically after loading an incorrectly sized image with pattern rec enabled
- Fixed bug that caused program crash when using skip or backup functionality while running batch file with semi-auto-fence
- Fixed axis label error in histogram plots in contact plot tool
- Added beta version of process-window analysis tool

5/17/06: Version 4.4.0
- Fixed bug in "export all data to csv" functionality
- Added ability to import hitachi offline ler analysis file (RMSR file) (Beta capability)
- Fixed bug that caused wrong LER analysis length to be used when full-length is chosen and the image has rectangular pixels
- New limit line setting allowing them to be set to a default value on image load.
- Add ability to read LZW-compressed TIFF files.
- New console window for messages to user.
- Fix problems with plot exporting from Surface tool
- Fix problem with exporting histogram plot data from the advanced LER tool
- Fixed problem with summary calculation in advanced LER tool that caused inacurate calculation of average HHCF function
- Fixed problems that caused the script interpreter engine to fail on the following function: threshold_meth, edge_meth, setdefaultafm, rotate, setpsdprocwin
- Expanded the contact tool box (still in Beta testing)
----- New contact recipe section added to recipe tool
----- Get correct frequency axis for PSD of contact LER
----- Add new advanced contact results window with both average and individual results individual results selected based on the "line select" widget
----- Add advanced contact plot tool, similar to advanced LER tool
----- Added compound analysis capabilities to contact LER mode
----- Made advanced LER tool work in contact LER mode

4/30/06: Version 4.3.1
- Improved CD computation accuracy in the precense of residual image rotation.
- Pitch and duty cycle now reported in the Advanced Results Window.
- Fixed bug that prevented ascii plot export when running without the Dev. Kit.
- Fixed bug that caused program crash when a summary report is requested from the Advanced LER tool when only one line has been analyzed.

4/17/06: Version 4.3.0
- New fence option enabling the user to explicitly define both left and right fence positions for each line separately (inner fence lines not shared). This greater flexibiity in fence positioning allow for optimization to highly asymetric line images. This new mode also allows lines too be skipped over. This new feature is selectable from the Fence section of the Recipe tool.
- New inner limit line feature allowing interior lines to be excluded from the analysis based on the positioning of this second set of vertical limit lines. This can be achieved both in conventional and the new non-shared fence modes. This feature is selectable through the Fence menu.
- Improved visibility of horizontal and vertical limit lines.
- New limit line setting allowing them to be set to a default value on image load.

3/17/06: Version 4.2.0
- New full projection image prefilter capability form measuring CD from very noisy images
- New fine auto-rotation compensation capabilities with user definable resolution and capture range
- New auto-fence filter capabilities improving autofence performance with noisy images

1/10/06: Version 4.1.0
- Improve SVL Lc accuracy by using sigma infinity
- New LER image synthesis capabilities (self-affine, white, sinusoidal)
- New window-selection menu for improved usability with multiple open tools

9/25/05: Version 4.0.0
- New pattern recognition capabilities enabling device-level LER measurement
- New ROI-based measurement-region selection method and movable ROI
- Autocalculate option on creation and moving of ROI
- True aspect ratio display capabilities for images with non-square pixels
- Improved batch output for scaling metrics
- New optional corner-rounding toolbox available
- New optional surface toolbox available including surface PSD computation and flare estimation tools
7/25/05: Version 3.7.6
- New loose pitch auto-fence algorithm added
- New auto fence algorithms that use a user set pitch instead of the estimated pitch
- Added an alternate general purpose autofence algorithm
- Fixed bug with trying to set iso line autofence mode from the recipe tool
- Improved accuracy and robustness of roughness exponent extraction from PSD
- Fixed computation error in the correlation length from HHCF
- Fixed bug in side-averaged threshold algorithm that could cause crash
- New automatic calibration capabilities for Hitachi CD-SEM
- Fixed bug in side-averaged threshold algorithm that could cause crash
- Fixed bug that caused Advanced LER Summary window to close after exporting data
- Fixed bug that caused a crash when Advanced LER tool under certain conditions
- Added Autocorrelation, HHCF, and Histogram plots to "Export all data to CSV file"
- Added Zygo file import capabilities
- Added crop to limit lines and undo crop capabilities

4/2/05: Version 3.7.2
- Enhanced usability of semi-auto fence in batch mode
- Averaged-line threshold method improved with respect to sensitivity to image tilt
- New side-independent thresholding algorithm added
- New advanced results window showing estimated noise-free and infinite length LER/LWR values
- New estimated metrics also saved to batch output file

2/19/05: Version 3.7.0
- New autocorrelation plot to Advanced LER Tool
- New edge correlation visualization tool
- New metrology noise estimation tool
- New model-based non-linear least squares edge-detection algorithm
- Enhanced image processing capabilities: export, undo, brightness/contrast
- New image colormap options
- Plot export capabilities for all plots through right-click context menus
- Installer will memorize serial number for future upgrade installations
- Fix bug that could cause erroneous warning message in semi-automatic fence modes

1/12/05: Version 3.6.0
- New autocalibration capabilities for AMAT SEMs
- New rectangular pixel capabilities
- Improved trench algorithms
- Recursive outlier correction
- Improved autofence
- Improved HHCF, SVL, and PSD metric extraction algorithms
- Fourier Domain SVL computation capabilities for improved speed
- User setable PSD computation length
- Plot export capabilities in Advanced LER tool through context menu
- New Wiener prefilter capabilities

12/5/04: Version 3.5.4
- Assymetric prefiltering capabilities added
- Gaussian filter size and sigma can now be seperately defined
- Image prefiltering preview capabilities added
- Expanded header section of CSV output file
- Added configuration snapshot output file to batch mode
- Update check on startup
- Fixed bug that caused image server to require at least thee image files in the watch directory

11/14/04: Version 3.5.0
- SuMMIT background analysis server functionality added: turn an analytic SEM into a CD SEM
- Fixed bugs in scripting language interpreter
- Improved autofencing capabilities
- Separate pre and post filter cut-off definitions
- More prefilter options
- 10x improvement in prefilter speed
- Added recipe lock functionality to recipe tool
- Fixed bug with loading recipes
- Added %line break option to LER calculation section of recipe tool
- Added PSD computation apodization window selection to recipe tool
- Added limit line settings to recipe tool
- Added full-length option to LER analysis length section in recipe tool
- Fixed bug in advanced LER GUI
- Added correlation-length estimation to sigma versus length plot
- Corrected error in correlation length estimation from height-height correlation plot
- Added roughness exponent estimation from PSD in advanced LER tool
- Added histogram plot with moment metrics to advanced LER tool
- Added advanced metric output to batch mode
- Added averaged PSD data to batch output and csv export file
- Added vertical limit lines and mode both vertical and horizontal limit lines wider
- Limit lines now rotate with image rotation
- Fixed bug that occured in rare cases when loading non-LEO tiff files
- Added image preview to file open dialog
- Expanded capabilities of compound analysis to handle virtually unlimited number of images
- Added cancel capabilities and %done status info when running batch or compound analysis
- Added new batch file generation capabilities using a multi-file open dialog
- Added name filtering capabilities to the directory-to-batch function
- Fixed bug related to using non-tif files in batch mode
- New User-defined prefiltering and LER-calculation capabilities added to Developer's Kit


8/1/04: Version 3.0.0 - Support new SEM file formats beyond tif and bmp: jpeg, gif, png, ras, ppm, hdf, pcx, xwd, bpm, pgm
- Improved GUI features
- - - Vertical limit lines added
- - - Vertical and horizontal limit lines easier to see and move
- - - Limit lines rotate with image
- - - File open dialog with image preview
- New Advanced Metrology Metric tool includes:
- - - PSD plot
- - - Height-height correlation plot
- - - Sigma versus length plot
- - - Histogram plot
- - - Automatic feature extraction and reporting for each plot type
- - - Supports LER and LWRv - - - Supports individual lines or left/right/full averaging
- - - Supports post filtering
- - - Summary capabilities generating table of all metrics for all lines
- - - Summary export capablities
- New metrology recipe tool
- - - Collects all user-setable computation controls into single streamlined dialog box
- - - Enables storage and retrieval of recipes
- - - Simplifies sharing and standardizing of recipes among users
- New script language capabilities
- - - Full GUI functionality implemented in scripting language
- - - Data export capabilities
- - - Batch-file execution capabilities
- - - Script file can be passed as a command-line startup argument enabling automatic execution and remote operations
- Improved batch and compound analysis capabilities
- - - Progress feedback and cancel capabilities
- - - Unlimited compound analysis size
- - - More automated batch file generation tools
- - - More file types supported in batch mode
- - - More data added to batch output file: correlation length, roughness exponent, average PSD ...
- New image filtering capabilities
- - - Separately define pre and post filter settings
- - - 10x speed improvement in prefilter
- - - New Gaussian, median, and averaging filter options added
- New Analysis Server functionality
- - - Run SuMMIT in the background on your analytic SEM and turn it into a CD-SEM
- Improved handling of trenches
- User control of the autofence threshold value
- Individual line CD and filtered LER/LWR data now included in the batch output file
- New autofence algorithm allowing for isolation of user-defined number of center lines
- LER analysis length can now be independently defined from the horizontal fence positions
- New user-defined fence capabilities in Developer's Kit
- New User-defined prefiltering and LER-calculation capabilities added to Developer's Kit
- Streamlined deployment of Matlab-based Developer's Kit allowing more shared resources when both products are installed




Graphics by Art for the web