SuMMIT is an interactive off-line analysis package for critical dimension (CD) and line-edge/width roughness (LER/LWR) processing of SEM images. This feature-rich analysis program integrates a variety of visualization tools and numerous built-in processing algorithms into a user-friendly GUI. Going much further beyond the conventional characterization of LER as a single 3-sigma deviation number, SuMMIT provides a wealth of integrated spectral analysis and visualizations techniques. SuMMIT is also capable of performing large unattended batch tasks, allowing large volumes of data to be analyzed quickly. A comprehensive description of SuMMIT capabilities can be found at the SuMMIT online documentation section on our support page.

SuMMIT Developer's Kit: Metrology needs can be quite varied. Thus, the optional SuMMIT Developer's Kit, a flexible implementation of SuMMIT that run in the Matlab* environvent, allows the user to customize the program through the Matlab language. This customization can be achieved in two tiers. The simpler method involves using the integrated user function prototypes provided in the key calculation steps. The provided function prototypes can be customized by the user, and the use of these functions can be controlled through the GUI in the definition of the metrology recipe. More powerful second-tier customization can be achieved by adding new features to SuMMIT. The Developer's Kit provides the user access to all the internal SuMMIT data and GUI settings. Matlab programmers can readily add new menu items and graphics elements to address specific needs.

SuMMIT Contact Analysis Toolbox adds contact metrology capabilities to SuMMIT. The capabilities include autofencing for contacts and a variety of contact-specific metrics in addition to conventional LER metrics where instead of comparing the edge to a line, it is compared to some reference shape such as a circle or ellipse. Full control over the contact analysis recipe is provided through an additional tab in the SuMMIT recipe tool. The contact analysis features include an advanced contact metric window which reports individual and average values for diameter, major and minor diameters, orientation, perimeter, area, circularity, and eccentricity. In addition the the advanced contact metric window, this toolbox also provides a new contact-metric plot tool that allows the user to select both the plot type as well as the specific metric to plot. The recipe control includes mechanisms to remove systematic effects from the contact roughness, due for example to assymetry in the contact or squarish corners.

SuMMIT Multi ROI Toolkit Included with the contact analysis toolbox, this toolkit allows SuMMIT to be operated in multiple ROI mode. Currently this mode works only with conventional line images allowing the user to select multiple descrete regions for simultaneous analysis. The regions need not be the same size. Future enhancements to this toolkit will include compatibility with contact analysis mode and the ability to simultaneously analyze both vertical and horizontal features (presently handles only vertical features).

SuMMIT Corner Rounding Toolbox adds corner-rounding measurement capabilities to SuMMIT. With the same ease of use as the rest of SuMMIT, the corner rounding toolbox enables high-accuracy computation of corner rounding as well as corner roughness. Such measurements can be key in comparing pattern fidelity of various processes.

SuMMIT Process Window Analysis Toolbox adds process window computation capabilities to SuMMIT. This provides a convenient, high performance alternative to high-priced lithographic data analysis packages. This toolbox also easily integrates with SuMMIT batch analysis through the use of SuMMIT process-window batch files. Process-window batch input files an be easily generated simply by adding corresponding dose and focus information to each line of the batch file. When such a batch is run, additional process-window output files are created during batch excecution which can be directly loaded into the process-window analysis toolbox.

SuMMIT Surface Analysis Toolbox adds surface PSD and Flare analysis capabilities to SuMMIT making SuMMIT relevant for system metrology as well as resist metrology. This toolbox enables detrending of surface data, the computation of 2D and isotropic PSDs, and the prediction of flare as a function of feature size and field size for cases where the surface data of interest represents an optical surface.

System Requirements:

SuMMIT:

• Computer: Window-compatible PC with Windows 2000 or newer
• Hard Drive: 50 Meg free space
• RAM: 128 Meg or more
• Display: 1024x768 resolution or higher

• Matlab 6.1 or higher running under Windows
• Matlab Image Processing Toolbox
• Matlab Signal Processing Toolbox

Purchasing SuMMIT: SuMMIT can be downloaded using the link on our support page, however, in order to install and run the program, license data is required. Please contact our sales department for a quote and delivery of a license file.

* Matlab is a powerful technical computing language and a registered trademark of The MathWorks Inc.

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