SEM Metrology Interactive Toolbox
(SuMMIT)

Multi ROI Toolkit: The contact analysis toolbox also comes packaged with the Multi ROI Toolkit. With this toolkit multiple regions of interest can be defined for analysis at the same time. Although this mode currently only works for line features, the toolkit can simultaneously handle regions with horizontal and vertical features. Once analyzed, the regions can be analyzed using all the customary SuMMIT tools including detailed spatial and spectral analysis of LER/LWR as well as Interline Variation Plot tool.



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