SuMMIT is an interactive toolbox for CD and LER processing of SEM images. SuMMIT integrates a variety of visualization tools and numerous built-in processing algorithms into a user-friendly GUI. SuMMIT is also capable of performing large unatented batch tasks allowing large volumes of data to be quickly analyzed.

As critical dimentions are pushed smaller and smaller, line-edge roughness (LER) becomes of increasing concern. The task of understanding and minimizing line-edge roughness requires repeatable, accurate, and insightful characterization of the properties of this roughness. The SuMMIT software package has been written exclusively to facilitate this task. Going much further beyond the conventional characterization of LER as a single 3-sigma deviation number, SuMMIT provides a wealth of integrated spectral analysis and visualizations techniques. SuMMIT also allows for exporting of data for easy off-line comparisons as well as batch processing of large volumes of data.