• Load Tiff, BMP, jpeg, gif, png, ras, ppm, hdf, pcx, xwd, bpm, pgm, images.
• Load Prolith AIM files
• Load DI AFM files
• Load Zygo files
• Pattern Rec for device-level LER or CD measurements
• Contact-analysis capabilities
• Corner-rounding measurement capabilities
• Process-window analysis capabilities
• Surface analysis tool, detrending, 2D PSD, isotropic PSD, integrated roughness, flare ...
• Batch mode operation.
• Scripting language support.
• Export "cleaned-up" processed image as tiff or Prolith mask file
• Synthesize SEM images of lines with LER and export image as tiff or Prolith mask file
• Results storage, retrieval, and export.
  • Save and reload calculation results to/from Matlab ".mat" files.
  • Export results to Excel-compatible ".csv" files.
  • Export results to Matlab command window (requires developers kit)
• Automatic calibration from most LEO and Hitachi SEM files.
• Various manual calibration methods.
• Built-in image processing.
  • Image rotation.
  • Negative image.
  • Image cropping.
  • Image filtering.
  • Processed image export.
• View zoom capabilities.
• User-configurable preferences.
• Automatic, semi-automatic, and manual fence positioning.
• Numerous built-in processing algorithms.
  • User-selectable threshold.
  • User-selectable threshold detection algorithm.
  • User-selectable line-edge interpolation algorithm.
  • User-selectable outlier handling.
  • Line-edge-data post processing options.
• Recipe creating storage and retrieval capabilities.
• Processing algorithm presets for SuMMIT default mode and MILERA emulation mode.
• User-defined algorithm presets for convenient recall of settings.
• User-Defined processing function capabilities (requires developers kit).
• Integrated visualization.
  • Lineout plots of SEM image.
  • Interactive threshold-setting plot of resist lines.
  • CD as a function of length along line.
  • Line-edge position as a function of length along line for easy outlier detection.
  • Spectral visualization.
  • Processed line-image visualization.
  • Line-edge overlay on SEM image and processed line image.
• Inegrated spectral analysis.
  • High-pass, low-pass, band-pass, and notch filtering of LER spectrum.
  • Automatic PSD noise-floor estimation.
• Integrated line-image pre-filtering options.
• Advanced LER Metrics.
  • Height-height correlation function.
  • Sigma versus length function.
  • PSD slope calculation.
  • Correlation length calculation.
  • Roughness exponent calculation.
  • Automatic PSD noise-floor estimation.
  • System noise estimation tool.
• Integrated interactive fence metrology.
• Integrated interactive line-out metrology

Home | Products | Contact | Support

Graphics by Art for the web