SEM Metrology Interactive Toolbox
(SuMMIT)

Corner Rounding Toolbox: With the corner rounding toolbox, SuMMIT can measure the radius of curvature of any given corner. Once a cut-line is positioned, a calculation can be run using the CALCULATE button. The estimated edge position will be indicated on the image as a yellow line and the radius will be reported in the Results area of the main window. Also reported is an LER value which is based on the deviation of the corner points from a true arc.

When subsequent images are loaded the cut-line position remains fixed simplifying the measurement of a series of similar images. The pattern recognition function also works in corner rounding mode further simplifying the characterization of numerous images.


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