About EUV Tech

EUV Tech started in 1997 and is the world's leading manufacturer of metrology equipment for EUV lithography.  EUV Tech provides many of the principal players in the semiconductor industry with EUV Reflectometers, EUV resist out-gassing measurement tools, and hydrogen radical cleaners for EUV optics. In 2005, EUV Tech's EUV Reflectometer was awarded Research and Development Magazine's "R&D 100 Award". EUV Tech’s SuMMIT Software Division also develops and markets SEM analysis software for the lithography community.

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